|本期目录/Table of Contents|

[1]杨成林,梁萍兰,问明亮,等. 氧化物对(111)锗片表面少子寿命的影响研究[J].浙江理工大学学报,2011,28(04):567-570.
　YANG Cheng lin,LIANG Ping lan,WEN Ming liang,et al. Study on the Effect of Oxidation on the Germanium Surface[J].Journal of Zhejiang Sci-Tech University,2011,28(04):567-570.
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 氧化物对(111)锗片表面少子寿命的影响研究()
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浙江理工大学学报[ISSN:1673-3851/CN:33-1338/TS]

卷:
第28卷
期数:
2011年04期
页码:
567-570
栏目:
(自科)纺织与服装工程
出版日期:
2011-08-31

文章信息/Info

Title:
 Study on the Effect of Oxidation on the Germanium Surface
文章编号:
16733851 (2011) 04056704
作者:
 杨成林;  梁萍兰;  问明亮;  席珍强
 浙江理工大学材料工程中心， 杭州 310018
Author(s):
 YANG Chenglin;  LIANG Pinglan;  WEN Mingliang;  XI Zhenqiang
Material Engineering Center, Zhejiang SciTech University, Hangzhou 310018, China
关键词:
 ; 过氧化氢;  锗;  氧化物;  少子寿命;  XPS
分类号:
TN304.0
文献标志码:
A
摘要:
    为了提高(111)锗片表面少子寿命，分别采用体积分数30%过氧化氢和硝酸作为氧化剂，对试样表面进行湿化学氧化，得到表面的氧化层。利用微波光电导衰减仪测量试样在氧化反应前后的少子寿命变化情况，采用X射线光电子能谱测试样的Ge3d谱图，并进行机理分析。结果发现：经过过氧化氢处理的试样少子寿命得到很大提高，分析是由于GeO2钝化了锗表面悬挂键而达到了钝化效果。

参考文献/References:

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备注/Memo

备注/Memo:
 收稿日期： 2010-11-03
作者简介： 杨成林(1987-)，男，河南周口人，硕士研究生，从事半导体材料的制备与加工技术研究。
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